@incollection{Sekiguchi11,
author = {Atsushi Sekiguchi},
title = {Approach to EUV Lithography Simulation},
booktitle = {Advances in Unconventional Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Gorgi Kostovski},
chapter = {9},
doi = {10.5772/23533},
url = {https://doi.org/10.5772/23533}
}