@incollection{Hiramatsu11,
author = {Atsushi Motogaito and Kazumasa Hiramatsu},
title = {Fabrication of Binary Diffractive Lens on Optical Films by Electron Beam Lithography},
booktitle = {Advances in Unconventional Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Gorgi Kostovski},
chapter = {7},
doi = {10.5772/21048},
url = {https://doi.org/10.5772/21048}
}