@incollection{Bose11,
author = {Jyoti Prakash Kar and Gouranga Bose},
title = {Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication},
booktitle = {Acoustic Waves},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Marco G. Beghi},
chapter = {25},
doi = {10.5772/20840},
url = {https://doi.org/10.5772/20840}
}