@incollection{Yanagitani11, author = {Takahiko Yanagitani}, title = {Shear Mode Piezoelectric Thin Film Resonators}, booktitle = {Acoustic Waves}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Marco G. Beghi}, chapter = {22}, doi = {10.5772/18797}, url = {https://doi.org/10.5772/18797} }