@incollection{Shirai11,
author = {Jhantu Kumar Saha and Hajime Shirai},
title = {Novel Deposition Technique for Fast Growth of Hydrogenated Microcrystalline Silicon Thin-Film for Thin-Film Silicon Solar Cells},
booktitle = {Solar Cells},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Leonid A. Kosyachenko},
chapter = {17},
doi = {10.5772/23263},
url = {https://doi.org/10.5772/23263}
}