@incollection{Hoffmann11,
author = {P. Hoffmann and N. Fainer and M. Kosinova and O. Baake and W. Ensinger},
title = {Compilation on Synthesis, Characterization and Properties of Silicon and Boron Carbonitride Films},
booktitle = {Silicon Carbide},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Moumita Mukherjee},
chapter = {21},
doi = {10.5772/24330},
url = {https://doi.org/10.5772/24330}
}