@incollection{Fraga11, author = {Mariana Amorim Fraga and Rodrigo Sávio Pessoa and Homero Santiago Maciel and Marcos Massi}, title = {Recent Developments on Silicon Carbide Thin Films for Piezoresistive Sensors Applications}, booktitle = {Silicon Carbide}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Moumita Mukherjee}, chapter = {15}, doi = {10.5772/20332}, url = {https://doi.org/10.5772/20332} }