@incollection{Akhtar11,
author = {Sanjeev Kumar Gupta and Jamil Akhtar},
title = {Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts},
booktitle = {Silicon Carbide},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Moumita Mukherjee},
chapter = {9},
doi = {10.5772/20465},
url = {https://doi.org/10.5772/20465}
}