@incollection{Beisenkhanov11,
author = {Kair Kh. Nussupov and Nurzhan B. Beisenkhanov},
title = {The Formation of Silicon Carbide in the SiCx Layers (x = 0.03–1.4) Formed by Multiple Implantation of C Ions in Si},
booktitle = {Silicon Carbide},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Moumita Mukherjee},
chapter = {4},
doi = {10.5772/22256},
url = {https://doi.org/10.5772/22256}
}