@incollection{Ganji11,
author = {Bahram Azizollah Ganji},
title = {Design and Fabrication of a Novel MEMS Silicon Microphone},
booktitle = {Crystalline Silicon},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Sukumar Basu},
chapter = {14},
doi = {10.5772/21277},
url = {https://doi.org/10.5772/21277}
}