@incollection{Liu11,
author = {Li and Xianming Liu},
title = {Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers},
booktitle = {Crystalline Silicon},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Sukumar Basu},
chapter = {6},
doi = {10.5772/23438},
url = {https://doi.org/10.5772/23438}
}