@incollection{Hayashi11, author = {Yasuaki Hayashi and Hideto Sawada and Hideyuki Takagi}, title = {Growth of Vertically Aligned Carbon Nanotubes by RF-DC Plasma Chemical Vapor Deposition}, booktitle = {Carbon Nanotubes}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Siva Yellampalli}, chapter = {1}, doi = {10.5772/17258}, url = {https://doi.org/10.5772/17258} }