@incollection{He11, author = {Jin He and Haijun Lou and Lining Zhang and Mansun Chan}, title = {Silicon-Based Nanowire MOSFETs: From Process and Device Physics to Simulation and Modeling}, booktitle = {Nanowires}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Abbass Hashim}, chapter = {15}, doi = {10.5772/16345}, url = {https://doi.org/10.5772/16345} }