@incollection{Tang11, author = {Fei Tang and Xiaohao Wang and Chulong Xu}, title = {FAIMS Biochemical Sensor Based on MEMS Technology}, booktitle = {New Perspectives in Biosensors Technology and Applications}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Pier Andrea Serra}, chapter = {1}, doi = {10.5772/16814}, url = {https://doi.org/10.5772/16814} }