@incollection{Kostsov11,
author = {Igor L. Baginsky and Edward G. Kostsov},
title = {MEMS Based on Thin Ferroelectric Layers},
booktitle = {Ferroelectrics},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Mickaël Lallart},
chapter = {2},
doi = {10.5772/17539},
url = {https://doi.org/10.5772/17539}
}