@incollection{Hamada11,
author = {Shigeru Hamada and Kenji Hasizume and Hiroyuki Nakaura and Yoshihide Sugimoto},
title = {Strength Reliability of Micro Polycrystalline Silicon Structure},
booktitle = {Microsensors},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Igor Minin},
chapter = {11},
doi = {10.5772/17032},
url = {https://doi.org/10.5772/17032}
}