@incollection{Hijikata11,
author = {Yasuto Hijikata and Hiroyuki Yaguchi and Sadafumi Yoshida},
title = {Growth Rate Enhancement of Silicon-Carbide Oxidation in Thin Oxide Regime},
booktitle = {Properties and Applications of Silicon Carbide},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Rosario Gerhardt},
chapter = {4},
doi = {10.5772/14591},
url = {https://doi.org/10.5772/14591}
}