@incollection{Habuka11,
author = {Hitoshi Habuka},
title = {Low Temperature Chemical Vapour Deposition of Polycrystalline Silicon Carbide Film Using Monomethylsilane Gas},
booktitle = {Properties and Applications of Silicon Carbide},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Rosario Gerhardt},
chapter = {3},
doi = {10.5772/14635},
url = {https://doi.org/10.5772/14635}
}