@incollection{Zenkevich11, author = {Andrei Zenkevich and Yuri Lebedinskii and Oleg Gorshkov and Dmitri Filatov and Dmitri Antonov}, title = {Structural and Electron Transport Properties of Ultrathin SiO2 Films with Embedded Metal Nanoclusters Grown on Si}, booktitle = {Advances in Diverse Industrial Applications of Nanocomposites}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Boreddy Reddy}, chapter = {14}, doi = {10.5772/15016}, url = {https://doi.org/10.5772/15016} }