@incollection{Nanver11, author = {Lis K. Nanver}, title = {Silicon Photodiodes for Low Penetration Depth Beams such as DUV/VUV/EUV Light and Low-Energy Electrons}, booktitle = {Advances in Photodiodes}, publisher = {IntechOpen}, address = {Rijeka}, year = {2011}, editor = {Gian Franco Dalla Betta}, chapter = {10}, doi = {10.5772/15396}, url = {https://doi.org/10.5772/15396} }