@incollection{Suzuki11,
author = {Kunihiro Suzuki},
title = {Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function},
booktitle = {Applications of Monte Carlo Method in Science and Engineering},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Shaul Mordechai},
chapter = {4},
doi = {10.5772/14539},
url = {https://doi.org/10.5772/14539}
}