@incollection{Igumenov11,
author = {Igor K. Igumenov and Tamara V. Basova and Vladimir R. Belosludov},
title = {Volatile Precursors for Films Deposition: Vapor Pressure, Structure and Thermodynamics},
booktitle = {Application of Thermodynamics to Biological and Materials Science},
publisher = {IntechOpen},
address = {Rijeka},
year = {2011},
editor = {Mizutani Tadashi},
chapter = {20},
doi = {10.5772/13356},
url = {https://doi.org/10.5772/13356}
}