@incollection{Sriram10,
author = {Sharath Sriram and Madhu Bhaskaran and Arnan Mitchell},
title = {Piezoelectric Thin Film Deposition: Novel Self-Assembled Island Structures and Low Temperature Processes on Silicon},
booktitle = {Piezoelectric Ceramics},
publisher = {IntechOpen},
address = {Rijeka},
year = {2010},
editor = {Ernesto Suaste-Gomez},
chapter = {1},
doi = {10.5772/9937},
url = {https://doi.org/10.5772/9937}
}