@incollection{Fan10, author = {Kuang-Chao Fan and Fang Cheng and Yejin Chen and Bor-Shen Chen}, title = {Probe Technologies for Micro/Nano Measurements}, booktitle = {Cutting Edge Nanotechnology}, publisher = {IntechOpen}, address = {Rijeka}, year = {2010}, editor = {Dragica Vasileska}, chapter = {9}, doi = {10.5772/8852}, url = {https://doi.org/10.5772/8852} }