Open access peer-reviewed chapter

X-Ray Analysis on Ceramic Materials Deposited by Sputtering and Reactive Sputtering for Sensing Applications

By Rossana Gazia, Angelica Chiodoni, Edvige Celasco, Stefano Bianco and Pietro Mandracci

Submitted: March 15th 2011Reviewed: August 16th 2011Published: February 1st 2012

DOI: 10.5772/30131

Downloaded: 3358

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Rossana Gazia, Angelica Chiodoni, Edvige Celasco, Stefano Bianco and Pietro Mandracci (February 1st 2012). X-Ray Analysis on Ceramic Materials Deposited by Sputtering and Reactive Sputtering for Sensing Applications, X-Ray Spectroscopy, Shatendra K. Sharma, IntechOpen, DOI: 10.5772/30131. Available from:

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