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Physics » Optics and Lasers » "X-Ray Spectroscopy", book edited by Shatendra K. Sharma, ISBN 978-953-307-967-7, Published: February 1, 2012 under CC BY 3.0 license. © The Author(s).

Chapter 6

The Use of Electron Probe MicroAnalysis to Determine the Thickness of Thin Films in Materials Science

By Frédéric Christien, Edouard Ferchaud, Pawel Nowakowski and Marion Allart
DOI: 10.5772/28877