Open access peer-reviewed chapter

The Use of Electron Probe MicroAnalysis to Determine the Thickness of Thin Films in Materials Science

By Frédéric Christien, Edouard Ferchaud, Pawel Nowakowski and Marion Allart

Submitted: March 3rd 2011Reviewed: August 3rd 2011Published: February 1st 2012

DOI: 10.5772/28877

Downloaded: 3591

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Frédéric Christien, Edouard Ferchaud, Pawel Nowakowski and Marion Allart (February 1st 2012). The Use of Electron Probe MicroAnalysis to Determine the Thickness of Thin Films in Materials Science, X-Ray Spectroscopy Shatendra K Sharma, IntechOpen, DOI: 10.5772/28877. Available from:

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