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Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering

By Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen

Submitted: May 17th 2010Reviewed: October 18th 2010Published: March 16th 2011

DOI: 10.5772/14049

Downloaded: 1699

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen (March 16th 2011). Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering, Wave Propagation Andrey Petrin, IntechOpen, DOI: 10.5772/14049. Available from:

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