Open access peer-reviewed chapter

Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering

By Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen

Submitted: May 17th 2010Reviewed: October 18th 2010Published: March 16th 2011

DOI: 10.5772/14049

Downloaded: 1989

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Pablo Albella, Francisco González, Fernando Moreno, José María Saiz and Gorden Videen (March 16th 2011). Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering, Wave Propagation, Andrey Petrin, IntechOpen, DOI: 10.5772/14049. Available from:

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