Open access peer-reviewed chapter

The Fabrication of High Aspect Ratio Nanostructures on Quartz Substrate

By Khairudin Mohamed and Maan M. Alkaisi

Submitted: April 19th 2012Reviewed: March 5th 2013Published: July 3rd 2013

DOI: 10.5772/56315

Downloaded: 2538

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Khairudin Mohamed and Maan M. Alkaisi (July 3rd 2013). The Fabrication of High Aspect Ratio Nanostructures on Quartz Substrate, Updates in Advanced Lithography Sumio Hosaka, IntechOpen, DOI: 10.5772/56315. Available from:

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