Open access peer-reviewed chapter

Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography

By Grégory Barbillon

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Published: July 3rd 2013

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Grégory Barbillon (July 3rd 2013). Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography, Updates in Advanced Lithography Sumio Hosaka, IntechOpen, DOI: 10.5772/56119. Available from:

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