Open access

Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography

Written By

Grégory Barbillon

Submitted: 04 April 2012 Published: 03 July 2013

DOI: 10.5772/56119

From the Edited Volume

Updates in Advanced Lithography

Edited by Sumio Hosaka

Chapter metrics overview

3,539 Chapter Downloads

View Full Metrics

Written By

Grégory Barbillon

Submitted: 04 April 2012 Published: 03 July 2013