Open access peer-reviewed chapter

Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography

By Guomin Jiang, Kai Shen and Michael R. Wang

Submitted: April 25th 2012Reviewed: March 19th 2013Published: July 3rd 2013

DOI: 10.5772/56417

Downloaded: 2274

© 2013 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Guomin Jiang, Kai Shen and Michael R. Wang (July 3rd 2013). Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography, Updates in Advanced Lithography Sumio Hosaka, IntechOpen, DOI: 10.5772/56417. Available from:

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