Open access peer-reviewed Edited volume

Updates in Advanced Lithography

Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.

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Updates in Advanced LithographyEdited by Sumio Hosaka

Published: July 3rd 2013

DOI: 10.5772/3348

ISBN: 978-953-51-1175-7

Books open for chapter submissions

25305 Total Chapter Downloads

9 Crossref Citations

19 Web of Science Citations

23 Dimensions Citations

chaptersDownloads

Open access peer-reviewed

1. Colloidal Lithography

By Ye Yu and Gang Zhang

3850

Open access peer-reviewed

2. Recent Advances in Two-Photon Stereolithography

By Arnaud Spangenberg, Nelly Hobeika, Fabrice Stehlin, Jean-Pierre Malval, Fernand Wieder, Prem Prabhakaran, Patrice Baldeck and Olivier Soppera

2085

Open access peer-reviewed

3. Femtosecond Laser Lithography in Organic and Non-Organic Materials

By Florin Jipa, Marian Zamfirescu, Alin Velea, Mihai Popescu and Razvan Dabu

1906

Open access peer-reviewed

4. Three-Dimensional Lithography Using Combination of Nanoscale Processing and Wet Chemical Etching

By Noritaka Kawasegi and Noboru Morita

1343

Open access peer-reviewed

5. Combination of Lithography and Coating Methods for Surface Wetting Control

By Athanasios Milionis, Ilker S. Bayer, Despina Fragouli, Fernando Brandi and Athanassia Athanassiou

2308

Open access peer-reviewed

6. Resist Homogeneity

By Nima Arjmandi

2500

Open access peer-reviewed

7. Soft UV Nanoimprint Lithography and Its Applications

By Hongbo Lan

3879

Open access peer-reviewed

8. Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography

By Grégory Barbillon

2628

Open access peer-reviewed

9. The Fabrication of High Aspect Ratio Nanostructures on Quartz Substrate

By Khairudin Mohamed and Maan M. Alkaisi

2537

Open access peer-reviewed

10. Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography

By Guomin Jiang, Kai Shen and Michael R. Wang

2269

Edited volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI
  • IET Inspec

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