Open access peer-reviewed chapter

Lab-on-a-Tube Surface Micromachining Technology

By Zhuoqing Yang and Yi Zhang

Submitted: May 27th 2016Reviewed: October 31st 2016Published: April 12th 2017

DOI: 10.5772/66664

Downloaded: 339

© 2017 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Zhuoqing Yang and Yi Zhang (April 12th 2017). Lab-on-a-Tube Surface Micromachining Technology, Thin Film Processes Jagannathan Thirumalai, IntechOpen, DOI: 10.5772/66664. Available from:

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