Open access peer-reviewed chapter

In Situ Transmission Electron Microscopy for Electronics

By Masashi Arita, Kouichi Hamada, Yasuo Takahashi, Kazuhisa Sueoka and Tamaki Shibayama

Submitted: October 31st 2014Reviewed: April 17th 2015Published: September 2nd 2015

DOI: 10.5772/60651

Downloaded: 744

© 2015 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Masashi Arita, Kouichi Hamada, Yasuo Takahashi, Kazuhisa Sueoka and Tamaki Shibayama (September 2nd 2015). In Situ Transmission Electron Microscopy for Electronics, The Transmission Electron Microscope Khan Maaz, IntechOpen, DOI: 10.5772/60651. Available from:

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