Thermal Engineering

1 Open Access Books

34 Authors and Editors

51 Web of Science Citations

30 Dimensions Citations

1 peer-reviewed open access book

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Most cited chapters in this category

Chapter titleDownloads
1. Implantation Damage Formation in GaN and ZnO

By Katharina Lorenz and Elke Wendler

Part of book: Ion Implantation

1724
2. Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

By Ovidio Peña-Rodríguez, José Olivares, Mercedes Carrascosa, Ángel García-Cabañes, Antonio Rivera and Fernando Agulló-López

Part of book: Ion Implantation

2133
3. Ion Implantation-Induced Layer Splitting of Semiconductors

By U. Dadwal, M. Reiche and R. Singh

Part of book: Ion Implantation

2497

Most downloaded chapters in this category in last 30 days

Chapter title
1. High-Resolution Ion Implantation from keV to MeV

By Sébastien Pezzagna and Jan Meijer

Part of book: Ion Implantation

2. Radio Frequency Quadrupole Accelerator: A High Energy and High Current Implanter

By Yuancun Nie, Yuanrong Lu, Xueqing Yan and Jiaer Chen

Part of book: Ion Implantation

3. Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

By Denis Shamiryan and Dmitriy V. Likhachev

Part of book: Ion Implantation

4. Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

By Ovidio Peña-Rodríguez, José Olivares, Mercedes Carrascosa, Ángel García-Cabañes, Antonio Rivera and Fernando Agulló-López

Part of book: Ion Implantation

5. Implantation Damage Formation in GaN and ZnO

By Katharina Lorenz and Elke Wendler

Part of book: Ion Implantation

6. Coulomb Heating Behaviour of Fast Light Diclusters in Si<100> Direction

By R. C. Fadanelli, M. Behar and J. F. Dias

Part of book: Ion Implantation

7. Ion Implantation-Induced Layer Splitting of Semiconductors

By U. Dadwal, M. Reiche and R. Singh

Part of book: Ion Implantation

8. Lattice Strain Measurements in Hydrogen Implanted Materials for Layer Transfer Processes

By Caroline Moulet and Mark. S. Goorsky

Part of book: Ion Implantation

9. Surface Modification by Ion Implantation to Improve the Oxidation Resistance of Materials for High Temperature Technology

By Hans-Eberhard Zschau and Michael Schütze

Part of book: Ion Implantation

10. Ion Implantation in Phase Change Ge2Sb2Te5 Thin Films for Non Volatile Memory Applications

By Stefania Maria Serena Privitera

Part of book: Ion Implantation