Applied Chemistry

1 Open Access Books

69 Authors and Editors

50 Web of Science Citations

59 Dimensions Citations

1 peer-reviewed open access book

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Most cited chapters in this category

Chapter titleDownloads
1. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

14977
2. High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of book: Lithography

6843
3. Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of book: Lithography

3359

Most downloaded chapters in this category in last 30 days

Chapter title
1. High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of book: Lithography

2. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

3. Fabrication of SiC-based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Softlithography Techniques

By Tae-Ho Yoon, Lan-Young Hong and Dong-Pyo Kim

Part of book: Lithography

4. Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint

By Harutaka Mekaru

Part of book: Lithography

5. Three Dimensional Nanoimprint Lithography Using Inorganic Electron Beam Resist

By Jun Taniguchi and Noriyuki Unno

Part of book: Lithography

6. Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

Part of book: Lithography

7. Application of Soft Lithography for Nano Functional Devices

By Shin-Won Kang

Part of book: Lithography

8. Nanoimprint Lithography

By Thomas Glinsner and Gerald Kreindl

Part of book: Lithography

9. Nanosphere Lithography for Nitride Semiconductors

By Wai Yuen Fu and Hoi Wai Choi

Part of book: Lithography

10. Direct Laser Lithography and Its Applications

By Hyug-Gyo Rhee

Part of book: Lithography