Applied Chemistry

1 Open Access Books

69 Authors and Editors

50 Web of Science Citations

51 Dimensions Citations

1 peer-reviewed open access book

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Most cited chapters in this category

Chapter titleDownloads
1. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

14594
2. Nano-Crystalline Diamond Films for X-ray Lithography Mask

By Linjun Wang, Jian Huang, Ke Tang and Yiben Xia

Part of book: Lithography

1875
3. Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of book: Lithography

3192

Most downloaded chapters in this category in last 30 days

Chapter title
1. Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

Part of book: Lithography

2. CO2 Laser Produced Tin Plasma Light Source as the Solution for EUV Lithography

By Akira Endo

Part of book: Lithography

3. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

4. High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of book: Lithography

5. Nanosphere Lithography for Nitride Semiconductors

By Wai Yuen Fu and Hoi Wai Choi

Part of book: Lithography

6. Direct Laser Lithography and Its Applications

By Hyug-Gyo Rhee

Part of book: Lithography

7. Metal Particle-Surface System for Plasmonic Lithography

By V. M. Murukeshan, K. V. Sreekanth and Jeun Kee Chua

Part of book: Lithography

8. Micro- and Nanopatterning of Surfaces Employing Self Assembly of Nanoparticles and Its Application in Biotechnology and Biomedical Engineering

By Claus Burkhardt, Kai Fuchsberger, Wilfried Nisch and Martin Stelzle

Part of book: Lithography

9. Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

By N.I. Chkhalo, A.E. Pestov, N.N., Salashchenko and M.N. Toropov

Part of book: Lithography

10. Grazing Incidence Mirrors for EUV Lithography

By Mariana Braic, Mihai Balaceanu and Viorel Braic

Part of book: Lithography