Applied Chemistry

1 Open Access Books

69 Authors and Editors

82 Web of Science Citations

77 Dimensions Citations

1 peer-reviewed open access book

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Most cited chapters in this category

Chapter titleDownloads
1. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

15540
2. High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of book: Lithography

7475
3. Nano-Crystalline Diamond Films for X-ray Lithography Mask

By Linjun Wang, Jian Huang, Ke Tang and Yiben Xia

Part of book: Lithography

2116

Most downloaded chapters in this category in last 30 days

Chapter title
1. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

2. High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of book: Lithography

3. Application of Soft Lithography for Nano Functional Devices

By Shin-Won Kang

Part of book: Lithography

4. Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

Part of book: Lithography

5. Micro- and Nanopatterning of Surfaces Employing Self Assembly of Nanoparticles and Its Application in Biotechnology and Biomedical Engineering

By Claus Burkhardt, Kai Fuchsberger, Wilfried Nisch and Martin Stelzle

Part of book: Lithography

6. Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of book: Lithography

7. Direct Laser Lithography and Its Applications

By Hyug-Gyo Rhee

Part of book: Lithography

8. Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

By N.I. Chkhalo, A.E. Pestov, N.N., Salashchenko and M.N. Toropov

Part of book: Lithography

9. Fabrication of SiC-based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Softlithography Techniques

By Tae-Ho Yoon, Lan-Young Hong and Dong-Pyo Kim

Part of book: Lithography

10. Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint

By Harutaka Mekaru

Part of book: Lithography