Applied Chemistry

1 Open Access Books

69 Authors and Editors

103 Web of Science Citations

85 Dimensions Citations

1 peer-reviewed open access book

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Most cited chapters in this category

Chapter titleDownloads
1. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

16047
2. High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of book: Lithography

7874
3. Nano-Crystalline Diamond Films for X-ray Lithography Mask

By Linjun Wang, Jian Huang, Ke Tang and Yiben Xia

Part of book: Lithography

2324

Most downloaded chapters in this category in last 30 days

Chapter title
1. Grazing Incidence Mirrors for EUV Lithography

By Mariana Braic, Mihai Balaceanu and Viorel Braic

Part of book: Lithography

2. Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of book: Lithography

3. Femtosecond Laser Nonlinear Lithography

By Hiroaki Nishiyama and Yoshinori Hirata

Part of book: Lithography

4. Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of book: Lithography

5. Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities

By N.I. Chkhalo, A.E. Pestov, N.N., Salashchenko and M.N. Toropov

Part of book: Lithography

6. Micro- and Nanopatterning of Surfaces Employing Self Assembly of Nanoparticles and Its Application in Biotechnology and Biomedical Engineering

By Claus Burkhardt, Kai Fuchsberger, Wilfried Nisch and Martin Stelzle

Part of book: Lithography

7. Direct Laser Lithography and Its Applications

By Hyug-Gyo Rhee

Part of book: Lithography

8. Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

Part of book: Lithography

9. Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 2: Simulation of Resist Developed Images at Electron and Ion Beam Lithography

By Katia Vutova, Elena Koleva and Georgy Mladenov

Part of book: Lithography

10. High Aspect Ratio Sloping and Curved Structures Fabricated by Proximity and UV-LED Backside Exposure

By Yoshinonori Matsumoto

Part of book: Lithography