Open access

High-Index Immersion Lithography

Written By

Keita Sakai

Submitted: 29 November 2010 Published: 02 December 2011

DOI: 10.5772/23630

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

Chapter metrics overview

3,475 Chapter Downloads

View Full Metrics

Written By

Keita Sakai

Submitted: 29 November 2010 Published: 02 December 2011