Open access

Nano-Accuracy Surface Figure Metrology of Precision Optics

Written By

Shinan Qian and Peter Takacs

Submitted: 30 May 2011 Published: 16 May 2012

DOI: 10.5772/37100

From the Edited Volume

Modern Metrology Concerns

Edited by Luigi Cocco

Chapter metrics overview

5,273 Chapter Downloads

View Full Metrics

Written By

Shinan Qian and Peter Takacs

Submitted: 30 May 2011 Published: 16 May 2012