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Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials

Written By

Gert Homm, Steve Petznick, Torsten Henning and Peter J. Klar

Submitted: 21 April 2011 Published: 07 March 2012

DOI: 10.5772/33576

From the Edited Volume

Materials Science and Technology

Edited by Sabar D. Hutagalung

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Written By

Gert Homm, Steve Petznick, Torsten Henning and Peter J. Klar

Submitted: 21 April 2011 Published: 07 March 2012