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High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)

Written By

Sh Mohd Firdaus, Husna Omar and Ishak Abd Azid

Submitted: 16 November 2011 Published: 10 October 2012

DOI: 10.5772/48253

From the Edited Volume

Finite Element Analysis - New Trends and Developments

Edited by Farzad Ebrahimi

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Written By

Sh Mohd Firdaus, Husna Omar and Ishak Abd Azid

Submitted: 16 November 2011 Published: 10 October 2012