Open access

Stress Measurements in Si and SiGe by Liquid-Immersion Raman Spectroscopy

Written By

Daisuke Kosemura, Motohiro Tomita, Koji Usuda and Atsushi Ogura

Submitted: 22 November 2011 Published: 29 August 2012

DOI: 10.5772/47831

From the Edited Volume

Advanced Aspects of Spectroscopy

Edited by Muhammad Akhyar Farrukh

Chapter metrics overview

2,726 Chapter Downloads

View Full Metrics

Written By

Daisuke Kosemura, Motohiro Tomita, Koji Usuda and Atsushi Ogura

Submitted: 22 November 2011 Published: 29 August 2012