Open access

Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers

Written By

Friedel Gerfers, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli and Li-PengWang

Published: 01 January 2010

DOI: 10.5772/6887

From the Edited Volume

Solid State Circuits Technologies

Edited by Jacobus W. Swart

Chapter metrics overview

10,137 Chapter Downloads

View Full Metrics

Written By

Friedel Gerfers, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli and Li-PengWang

Published: 01 January 2010