Open access

Polycrystalline Silicon Piezoresistive Nano Thin Film Technology

Written By

Xiaowei Liu, Changzhi Shi and Rongyan Chuai

Published: 01 January 2010

DOI: 10.5772/6886

From the Edited Volume

Solid State Circuits Technologies

Edited by Jacobus W. Swart

Chapter metrics overview

2,935 Chapter Downloads

View Full Metrics

Written By

Xiaowei Liu, Changzhi Shi and Rongyan Chuai

Published: 01 January 2010