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Engineering » Energy Engineering » "Solar Cells - Thin-Film Technologies", book edited by Leonid A. Kosyachenko, ISBN 978-953-307-570-9, Published: November 2, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 17

Novel Deposition Technique for Fast Growth of Hydrogenated Microcrystalline Silicon Thin-Film for Thin-Film Silicon Solar Cells

By Jhantu Kumar Saha and Hajime Shirai
DOI: 10.5772/23263