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Materials Science » Semiconductors » "Silicon Carbide - Materials, Processing and Applications in Electronic Devices", book edited by Moumita Mukherjee, ISBN 978-953-307-968-4, Published: October 10, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 9

Thermal Oxidation of Silicon Carbide (SiC) – Experimentally Observed Facts

By Sanjeev Kumar Gupta and Jamil Akhtar
DOI: 10.5772/20465