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Materials Science » Semiconductors » "Silicon Carbide - Materials, Processing and Applications in Electronic Devices", book edited by Moumita Mukherjee, ISBN 978-953-307-968-4, Published: October 10, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 4

The Formation of Silicon Carbide in the SiCx Layers (x = 0.03–1.4) Formed by Multiple Implantation of C Ions in Si

By Kair Kh. Nussupov and Nurzhan B. Beisenkhanov
DOI: 10.5772/22256