Open access peer-reviewed chapter

Recent Developments on Silicon Carbide Thin Films for Piezoresistive Sensors Applications

By Mariana Amorim Fraga, Rodrigo Sávio Pessoa, Homero Santiago Maciel and Marcos Massi

Submitted: November 8th 2010Reviewed: April 11th 2011Published: October 10th 2011

DOI: 10.5772/20332

Downloaded: 3665

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Mariana Amorim Fraga, Rodrigo Sávio Pessoa, Homero Santiago Maciel and Marcos Massi (October 10th 2011). Recent Developments on Silicon Carbide Thin Films for Piezoresistive Sensors Applications, Silicon Carbide Moumita Mukherjee, IntechOpen, DOI: 10.5772/20332. Available from:

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