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Recent Developments on Silicon Carbide Thin Films for Piezoresistive Sensors Applications

Written By

Mariana Amorim Fraga, Rodrigo Sávio Pessoa, Homero Santiago Maciel and Marcos Massi

Submitted: 08 November 2010 Published: 10 October 2011

DOI: 10.5772/20332

From the Edited Volume

Silicon Carbide - Materials, Processing and Applications in Electronic Devices

Edited by Moumita Mukherjee

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Written By

Mariana Amorim Fraga, Rodrigo Sávio Pessoa, Homero Santiago Maciel and Marcos Massi

Submitted: 08 November 2010 Published: 10 October 2011