Open access peer-reviewed chapter

Introducing Ohmic Contacts into Silicon Carbide Technology

By Zhongchang Wang, Susumu Tsukimoto, Mitsuhiro Saito and Yuichi Ikuhara

Submitted: November 9th 2010Reviewed: March 21st 2011Published: October 10th 2011

DOI: 10.5772/20481

Downloaded: 3427

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Zhongchang Wang, Susumu Tsukimoto, Mitsuhiro Saito and Yuichi Ikuhara (October 10th 2011). Introducing Ohmic Contacts into Silicon Carbide Technology, Silicon Carbide Moumita Mukherjee, IntechOpen, DOI: 10.5772/20481. Available from:

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